Basic features

    • Unique Mercury probe:
      • Dot area 5E-5 to 0.6 cm2
      • Contact area repeatability better 2%
      • Contact configurations: Dot, Dot / Ring, Dot / 2 Rings
      • Refreshed mercury before each contact insures clean contact
      • Probe head easy to change
      • Integrated light source for illumination of measured sample (probe head dependent)
      • Minimal probe head to wafer contact area
      • Non scratching poly-carbonate probe head material

    Basic features of Mercury Probe Systems

    • Capacitance test:
      • Quasistatic method with square wave signals (internal)
      • High frequency method with square wave signals (internal)
      • Deep pulsed method with square wave signals (internal)
      • Test frequency up to 10kHz (Bandwidth 1 MHz)
      • External C-V meters (Bandwidth:1MHz standard, up to 10MHz optional)
      • Capacitance measurement range: 0 to 20 nF
      • Stray capacitance < 1.5pF (desktop systems)
      • Equivalent oxide thickness by C-V: 1 nm to 2000 nm, repeatability <±1%
      • Bias voltage +/- 100 V
    • Current / Voltage test:
      • Bias voltage +/- 100 V (with external source up to +/- 1000V, optional)
      • Current range: 10fA to 1mA with freely selectable threshold
      • Oxide thickness by I-V method 1.5 nm to 3nm
    • Edge exclusion down to 2mm (probe head dependent)
    • Versatility:
      • Connections for external 2 and 4 terminal meters
      • Connections for attaching external probe stage
    • Internal automatic calibration
    • Norms and standards:
      • SEMI S2-0200 standard compliant (92A/B)
      • CE mark (European models only)
      • EN55024:1998
      • FCC Part 15 Class A

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