333A Four-Point Probe for 300mm

Model 333A Four-Point Probe for 300mm

Features:

  • Automated Sheet Resistivity Meter
  • 1 mOhm / square to 800 kOhm / square
  • extended range up to 8E11 W/sq
  • up to to 12" wafer capability
  • Automap software package
  • SECS-II communication available
  • Automatic probe-head switching available

Facility requirements:

  • Power: 100 / 115 / 230 VAC, 50/60Hz, 1 kW
  • Vacuum 20 in. Hg
  • Footprint 333A (depth, width, height cover closed/open): 36" x 20" x 18"/35" (91.5 cm, 51cm, 46cm89cm) plus room for desktop computer, monitor, printer, keyboard, mouse.

 

Brochure Basic Specs Probe Head Selection Guide