Four-Point Probes
Four Dimensions' Four Point Probe systems measure the sheet
resistance / resistivity / thickness of a wide range of
materials. We offer a wide range of models, options, and probe
heads to suit your materials', measurement, and budget needs. We
can also tailor systems to your special
requirements.
All our four-point probe systems (except computerless models) can be
modified to measure the pn junction leakage of USJ (range 1E-9 to 1E-2
S/cm2).
Model 120HH Hand-Held Four-Point Probe
Features:
- Easy setup to hand position probe head over the sample
- Spring-loaded Probe-Needle Guard
- Switch to start measurement when probe is down
- Sheet Resistivity Meter
- 1 mOhm / square to 800 kOhm / square
- 3-1/2 Digits LED Panel Display
- 1m cable between meter and probe
Brochure,
Facility requirements, and Probe Head Selection Guide,
top
Model 120 Ingot Four-Point Probe
Features:
- Manual or automatic (computer controlled) probing of ingots
- 1 mOhm / square to 800 kOhm / square
- Temperature compensation option
Brochure, Facility requirements, and Probe Head Selection Guide,
top
280I Series Desktop Four-Point
Probes
Features:
- Automated Sheet Resistivity Meter
- 1 mOhm / square to 800 kOhm / square
- extended range up to 8x1011W/sq
- temperature compensation option
- up to to 8" wafer capability or 156mm x 156mm
- stand alone systems and PC controlled systems with Automap software package
Brochure,
Basic Specs, Facility requirements,
and Probe Head Selection Guide
top
Model 233AC Cassette to Cassette
Four-Point Probe
Features:
- cassette to cassette version of 280 Series
- small foot print
- C2C handling without robot
- edge defect tolerant automatic wafer alignment
- 1 mOhm/square to 800 kOhm / square
- extended range up to 8x1011W/sq
- up to to 8" wafer capability
- Automap software package
- SECS-II communication available
Brochure,
Basic Specs, Facility requirements,
and Probe Head Selection Guide
top
Model 333A Four-Point Probe for
300mm
Features:
- Automated Sheet Resistivity Meter
- 1 mOhm / square to 800 kOhm / square
- extended range up to 8x1011W/sq
- up to to 12" wafer capability
- Automap software package
- SECS-II communication available
- Automatic probe-head switching available
Brochure,
Basic Specs, Facility requirements,
and Probe Head Selection Guide
top
Model 333AC/AF Cassette to Cassette Four-Point Probe
Features:
- Cassette to Cassette version of Model 333A
- 8" (optional) and 12" wafer capability
- Cassette to cassette with small foot print
- Open cassette: Model 333AC
- FOUP capability: Model 333AF
- Automap software package
- SECS-II communication available
- Edge defect tolerant automatic wafer alignment available
- Automatic probe-head switching available
Brochure,
Basic Specs, Facility requirements,
and Probe Head Selection Guide
top
Model 680I Dynamic four-point probe
Features:
- Automated Sheet Resistivity Meter for III-V compound
materials
- dynamic AC waveform to overcome contact resistance
problems
- five point measurement available
- 10 mOhm / square to 40 kOhm / square
- up to to 8" wafer capability
- Automap software package
Brochure, Basic Specs, Facility requirements, and Probe Head Selection Guide
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1100SI Series,
Far reaching four-point probes
Features:
- Automated Sheet Resistivity Meter
- with x-y stage for flat panel application (G1, G2, G4,
G4.5, G5)
- customized sizes available
- 1 mOhm / square to 800 kOhm / square
- extended range up to 8x1011W/sq
- Automap software package
- SECS-II communication available
Brochure,
Basic Specs, Facility requirements,
and Probe Head Selection Guide
top