Accessories for Mercury Probe CVmap systems

Model 192 probe station:

• Designed for use with ferro-electric materials
• Setup for 0 to 100 MHz C-V and P-E plotting with CV Map 92B computer
• Motor driven precision X-Y-Theta with 10 micron resolution
• Gold plated 8" chuck for maintaining low contact resistance to the wafer backside, with vacuum for wafer holding
• Stereo microscope, LCD camera viewers, and light source
• Monitor for displaying LCD camera view
• Probe up-down hand controlled lever with adjustable down probing limit
• Enclosure with easy to handle cover for keeping out interference

Temperature Chamber:

• Temperature chamber to keep wafer surface at controlled temperature for Curie temperature measurement
• Y-Theta movement

Hot chuck:

• Designed for mobile ion detection
• Room temperature to 250 C
• Heating and cooling controlled by CVmap software

All rights reserved Four Dimensions, Inc., Specifications subject to change without notice.