Four Dimensions' Automap
Software
Features:
- Cartesian or polar maps with measurements
up to more than 600 sites
- full or partial wafer mapping
- color 2D contour and 3D mapping
- 1, 5, 9 points measurement arrays,
diameter scans, and ASTM/SEMI X-patterns
- customer specified measurement sites up to
5000 points
- round or rectangular test patterns
- thickness correction
- edge correction
- temperature correction (optional)
- measurement units: sheet resistance W/sq,
resistivity W-cm, resistance V/I, thickness t(µ), thickness
t(Å)
- easy unit conversion
- librarian data storage
- p-n type detection
- repeatability testing
- data export to ASCII files or Microsoft
Excel
- remote data access via LAN
- diagnostics
- selectable security levels user
- runs on Microsoft Windows 95/98/2000/NT
- statistical process control (SPC) option
- check whether a process is within control
limits using X-Bar/R charts and histograms
- SECS-II optional
All rights reserved Four Dimensions, Inc.,
Specifications subject to change without notice.