233AC Four-Point Probe

233AC Cassette to Cassette Four-Point Probe

Features:

  • cassette to cassette version of 280 Series
  • small foot print
  • C2C handling without robot
  • edge defect tolerant automatic wafer alignment
  • 1 mOhm/square to 800 kOhm / square
  • extended range up to 8E11 W/sq
  • up to to 8" wafer capability
  • Automap software package
  • SECS-II communication available

Facility requirements:

  • Power: 100 / 115 / 230 VAC, 50/60Hz, 1 kW
  • Vacuum 20 in. Hg
  • Footprint (depth, width, height): 24" x 41.5" x 65" ( 60cm, 105.5cm, 164.5cm)

 

Brochure Basic Specs

Probe Head Selection Guide