Model 680I Dynamic Four-Point probe

Features:

• Automated Sheet Resistivity Meter for III-V compound materials
• dynamic AC waveform to overcome contact resistance problems
• five point measurement available
• 10 mOhm / square to 40 kOhm / square
• up to to 8" wafer capability
• Automap software package

Facility requirements:

• Power: 100 / 115 / 230 VAC, 50/60Hz, 200 W
• Vacuum 20 in. Hg
• Table Footprint (depth, width, height): 22" x 20 " x 14.5" (55.9 cm, 50.8 cm, 36.8 cm)

Brochure Basic Specs Probe Head Selection Guide